I-WVCP6000 Water Vapor Cryopump Cryogenic Refrigeration Systems
Incazelo Yomkhiqizo
I-Guangzhou Xieyi Automation Technology Co., Ltd., eyasungulwa ngo-2011, iyibhizinisi eliyingqayizivele elisezingeni eliphezulu eNingizimu yeChina elihlanganyela ekuthuthukisweni kocwaningo, ukukhiqizwa, ukubonisana nobuchwepheshe kanye nenkonzo yamaphampu okubamba umhwamuko wamanzi asezingeni eliphansi kakhulu kanye nokunye. imishini yokushisa ephansi kakhulu.
Ama-Cryochiller e-XIEYI WVCP angamasistimu wesiqandisi se-cryogenic avaliwe anikeza ama-watts angu-550 ~ 6,000 watts okupholisa.Lawa ma-cryochiller angasetshenziswa ukubamba umhwamuko wamanzi nezinye izinto ezijiyayo ngokuziqandisa endaweni ebandayo njengekhoyili ye-Meissner (cryocoil).Ama-cryochiller e-WVCP nawo asetshenziselwa ukupholisa izinto ezifana ne-electrostatic chucks esetshenziswa ekucubunguleni i-wafer ye-semiconductor.
Ipharamitha Yezobuchwepheshe
| Imodeli | I-WVCP6000-SH | I-WVCP6000-DH |
| Umthamo omkhulu wokupholisa(W) | 6000 | 6000 |
| Ithiyori isivinini esikhulu sokupompa se-tubular cold trap(L/S) | 588000 | 588000 |
| Ithiyori yesivinini esiphezulu se-plate cold trap(L/S) | 882000 | 882000 |
| Ivacuum yokugcina(mbar) | 2*10-8 | 2*10-8 |
| Isikhathi sokuncibilika sendawo ebanda kakhulu yesicupho(imizuzu) | <5 | <5 |
| Ibanga elilungisekayo le-defrost lokushisa(℃) | -20-30 | -20-30 |
| Imodi yokulawula ukucindezela | Inzwa yedijithali+Iswishi yomshini | Inzwa yedijithali+Iswishi yomshini |
| Ukubuyisela ngokushesha umsebenzi wengcindezi yebhalansi (QRBP) | Yebo | Yebo |
| Umsebenzi wokufakazela ukuvimbela uwoyela (OBP) | Yebo | Yebo |
| Isilawuli kude se-4G | Yebo | Yebo |
| Izici zemidiya ebandayo | I-Pro-imvelo | I-Pro-imvelo |
| Indawo ephezulu ye-tubular cold trap(㎡) | 4 | 4 |
| Indawo ephezulu yomgibe obandayo wepuleti(㎡) | 6 | 6 |
| Ukucaciswa kogibe olulodwa olubandayo(㎡) | φ16mm*80m | / |
| Ukucaciswa kogibe olubandayo oluphindwe kabili(㎡) | / | 2*φ16mm*40m |
| Isixhumi esibonakalayo segesi | 12.7 i-copper welded junction(Ejwayelekile) | 12.7 i-copper welded junction(Ejwayelekile) |
| I-ParkerCPI/VCR(Uma uthanda) | I-ParkerCPI/VCR(Uma uthanda) | |
| Ukugeleza kwamanzi okupholisa (L/Miz ku-24 ℃) | 48 | 48 |
| Izinga lokushisa le-alamu yamanzi okupholisa(℃) | 38 | 38 |
| Umbhoshongo wokupholisa | Yebo | Yebo |
| Isixhumi samanzi okupholisa(L/S) | G1” | G1” |
| Amandla okulayisha aphezulu(kW) | 25.3 | 25.3 |
| Amandla we-Compressor nominal (HP) | 20 | 20 |
| Ukunikezwa kwamandla (50HZ) | 380-400V AC 3P(H) | 380-400V AC 3P(H) |
| 200-230V AC 3P(L) | 200-230V AC 3P(L) | |
| Ubukhulu(MM) | 935(L)*873(D)*1809(H) | 1235(L)*873(D)*1809(H) |
| Isisindo(KG) | 655 | 655 |
