I-WVCP3000 Water Vapor Cryopump Cryogenic Refrigeration Systems

Incazelo emfushane:

I-Fast Defrost
Isicupho esibandayo sipholile ku -135 ℃
Yehlisa Izikhathi Zokumpompa ngo-25% ukuya ku-50%
Ukusetshenziswa kwamandla okuphansi
Umthelela omncane kwezemvelo, awunawo ama-CFC nama-HCFC

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Incazelo Yomkhiqizo

I-Guangzhou Xieyi Automation Technology Co., Ltd., eyasungulwa ngo-2011, iyibhizinisi eliyingqayizivele elisezingeni eliphezulu eNingizimu yeChina elihlanganyela ekuthuthukisweni kocwaningo, ukukhiqizwa, ukubonisana nobuchwepheshe kanye nenkonzo yamaphampu okubamba umhwamuko wamanzi asezingeni eliphansi kakhulu kanye nokunye. imishini yokushisa ephansi kakhulu.

Ama-Cryochiller e-XIEYI WVCP angamasistimu wesiqandisi se-cryogenic avaliwe anikeza ama-watts angu-550 ~ 6,000 watts okupholisa.Lawa ma-cryochiller angasetshenziswa ukubamba umhwamuko wamanzi nezinye izinto ezijiyayo ngokuziqandisa endaweni ebandayo njengekhoyili ye-Meissner (cryocoil).Ama-cryochiller e-WVCP nawo asetshenziselwa ukupholisa izinto ezifana ne-electrostatic chucks esetshenziswa ekucubunguleni i-wafer ye-semiconductor.

Ipharamitha Yezobuchwepheshe

Imodeli	I-WVCP3000-SH	I-WVCP3000-DH
Umthamo omkhulu wokupholisa(W)	3000	3000
Ithiyori isivinini esikhulu sokupompa se-tubular cold trap(L/S)	249900	249900
Ithiyori yesivinini esiphezulu se-plate cold trap(L/S)	352800	352800
Ivacuum yokugcina(mbar)	2*10-8	2*10-8
Isikhathi sokuncibilika sendawo ebanda kakhulu yesicupho(imizuzu)	<3	<3
Ibanga elilungisekayo le-defrost lokushisa(℃)	-20-30	-20-30
Imodi yokulawula ukucindezela	Inzwa yedijithali+Iswishi yomshini	Inzwa yedijithali+Iswishi yomshini
Ukubuyisela ngokushesha umsebenzi wengcindezi yebhalansi (QRBP)	Yebo	Yebo
Umsebenzi wokufakazela ukuvimbela uwoyela (OBP)	Yebo	Yebo
Isilawuli kude se-4G	Yebo	Yebo
Izici zemidiya ebandayo	I-Pro-imvelo	I-Pro-imvelo
Indawo ephezulu ye-tubular cold trap(㎡)	1.7	1.7
Indawo ephezulu yomgibe obandayo wepuleti(㎡)	2.4	2.4
Ukucaciswa kogibe olulodwa olubandayo(㎡)	φ16mm*34m	/
Ukucaciswa kogibe olubandayo oluphindwe kabili(㎡)	/	2φ16mm17m
Isixhumi esibonakalayo segesi	12.7 i-copper welded junction(Ejwayelekile)	12.7 i-copper welded junction(Ejwayelekile)
Isixhumi esibonakalayo segesi	I-ParkerCPI/VCR(Uma uthanda)	I-ParkerCPI/VCR(Uma uthanda)
Ukugeleza kwamanzi okupholisa (L/Miz ku-24 ℃)	28	28
Izinga lokushisa le-alamu yamanzi okupholisa(℃)	38	38
Umbhoshongo wokupholisa	Yebo	Yebo
Isixhumi samanzi okupholisa(L/S)	G3/4	G3/4
Amandla okulayisha aphezulu(kW)	16.5	16.5
Amandla we-Compressor nominal (HP)	10	10
Ukunikezwa kwamandla (50HZ)	380-400V AC 3P(H)	380-400V AC 3P(H)
Ukunikezwa kwamandla (50HZ)	200-230V AC 3P(L)	200-230V AC 3P(L)
Ubukhulu(MM)	935(L)873(D)1809(H)	935(L)873(D)1809(H)
Isisindo(KG)	480	480