Ubuchwepheshe be-vacuum coating, okwaziwa nangokuthi ubuchwepheshe befilimu emincane, busetshenziswa ezimbonini eziningi ezahlukahlukene, njengama-foil okugcina amaphakheji amasha embonini yokudla, amafilimu okuvikela ukugqwala, ukukhiqizwa kwamaseli elanga, okokuhlobisa kwezinsiza zokugezela nobucwebe. , ukubala ezimbalwa.
Imakethe yemishini ye-vacuum coating ihlukaniswe ngesisekelo sohlelo lokusebenza, ubuchwepheshe kanye nesifunda.Ngokobuchwepheshe, imakethe iphinde ihlukaniswe yaba yi-chemical vapor deposition (CVD), i-vapor deposition ebonakalayo (ngaphandle kokufakaza), kanye ne-sputtering.
Ingxenye yokubeka umhwamuko ngokomzimba ihlukaniswe yaba ukuhwamuka nokunye (i-pulsed laser, i-arc laser, njll.).Ingxenye yokuhwamuka kulindeleke ukuthi ibonise ukwanda okukhulu emugqeni wesikhathi wocwaningo ngenxa yokukhula okuhle kwemboni ye-semiconductor.
Ngaphansi kwe-sputtering, imakethe ihlukaniswe yaba i-sputtering esebenzayo, i-magnetron sputtering (i-RF magnetron sputtering, njll. (pulsed DC, HPIMS, DC, njll.)) nokunye (ama-RF diode, imishayo ye-ion, njll.).
Umkhakha we-magnetron sputtering ukhula kancane kancane, uqhutshwa yimikhuba emihle ehlobene nezimboni zokukhiqiza kanye ne-electronics.
Ngokuya ngesicelo, imakethe ihlukaniswe ngezicelo ze-CVD, izicelo ze-PVD, kanye nezinhlelo zokusebenza ze-sputtering.Ngaphansi kwesicelo se-PVD, imakethe iphinde ihlukaniswe yaba yimishini yezokwelapha, i-microelectronics, amathuluzi okusika, isitoreji, amandla elanga, nokunye.Ingxenye yokugcina kulindeleke ukuthi ibone ukukhula okuhle ngesikhathi sokuhlaziya ngenxa yokwanda kwesidingo sokugcinwa kanye nokuthandwa okukhulayo kwama-SSD.
Ezinye izinhlelo zokusebenza ze-PVD zifaka izingxenye ze-aerospace, izingxenye zezimoto, ukupakisha, nokunye.
Ngaphansi kwezinhlelo zokusebenza ze-sputtering, imakethe ihlukaniswe yaba amafilimu kazibuthe, izinzwa zegesi, i-metalization yamasekhethi amancane nama-chip carriers, amafilimu amelana nokugqwala, amafilimu aphikisayo, izinto zokugcina ezibonakalayo, njll.
Ngaphansi kwesicelo se-CVD, imakethe ihlukaniswe yaba yi-polymer, isekethe ehlanganisiwe (IC) kanye namadivayisi we-photovoltaic, kanye nezinhlaka zensimbi zensimbi (isitoreji segesi, i-adsorption, isitoreji nokuhlanzwa, inzwa yegesi kanye ne-low-k dielectrics, i-catalysis, njll.), nokunye. .
Isikhathi sokuthumela: May-12-2022